| 摘要 |
PURPOSE:To improve the yield rate of a sensor, by measuring the resonant frequency, and cutting and adjusting the tip of the free end of a vibrator by the quantity corresponding to the difference between the measured frequency and the present frequency. CONSTITUTION:The piezoelectric vibrator 4 is attached to a base 1, and a terminal 7 and a base 1 are connected to a frequency measuring device 18. The resonant frequency fo, Q value, and the like of the vibrator 4 are measured and computed by the frequency measuring device 18. The difference DELTAf between the measured value and the preset resonant frequency is computed, and the feeding amount for machining is computed based on the magnitude of DELTAf. A movable base 11 is quickly sent to a machining position, and a grinder rotating motor 17 is rotated. At the same time, the movable base 11 is sent by the computed feeding amount for machining at a specified feeding speed by a pulse motor 15. The entire tip surface of the piezoelectric vibrator 4 is ground by a specified amount in parallel. The measurement and grinding are repeated several times until the resonant frequency becomes the allowable range of the target value, and the adjustment of the resonant frequency is completed. |
