FILM BULK ACOUSTIC RESONATOR AND METHOD FOR FABRICATING THE SAME

摘要

A film bulk acoustic resonator and a manufacturing method thereof are provided to improve strength and a resonance frequency property of a support layer by enhancing a coupling property between an electrode and a piezoelectric layer. A film bulk acoustic resonator includes a substrate(100), a support layer(200), a lower aluminum electrode(300), a buffer layer(400), a zinc oxide piezoelectric layer(500), and an upper aluminum electrode(600). The support layer is formed on the substrate. The lower aluminum electrode is formed on the support layer. The buffer layer is formed on the lower aluminum electrode. The zinc oxide piezoelectric layer is formed on the buffer layer. The upper aluminum electrode is formed on the zinc oxide piezoelectric layer.