发明名称 Evaporator boat, and method for its manufacture
摘要 A boat for evaporating metals at high rates, which consists of from 40% to 70% of ZrO2 and from 30% to 60% of Mo, has a coating, on its inside, made of tungsten and/or molybdenum. Thus metals such as copper, iron, nickel or alloys of these metals can be vapour-deposited at high rates onto strip-shaped foils.
申请公布号 DE3114467(A1) 申请公布日期 1982.10.28
申请号 DE19813114467 申请日期 1981.04.09
申请人 SIEMENS AG 发明人 HAFT,ROLAND,DIPL.-ING.
分类号 C04B41/51;C04B41/88;C23C14/24;(IPC1-7):C23C13/12;C23C7/00 主分类号 C04B41/51
代理机构 代理人
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