摘要 |
A boat for evaporating metals at high rates, which consists of from 40% to 70% of ZrO2 and from 30% to 60% of Mo, has a coating, on its inside, made of tungsten and/or molybdenum. Thus metals such as copper, iron, nickel or alloys of these metals can be vapour-deposited at high rates onto strip-shaped foils.
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