发明名称 |
METHOD OF AND APPARATUS FOR THE PRODUCTION OF ELECTRICAL COMPONENTS PARTICULARLY LAMINATED CAPACITORS |
摘要 |
Electrical components which have alternate metal and polymer layers carried on a substrate are produced by fixing the substrates on a rotatable drum and rotating the drum through first and second vacuum chambers which are air-locked with respect to each other. A metal layer is applied in the first vacuum chamber by vapor deposition or sputtering and a polymer layer is provided in the second chamber by a glow discharge operation. |
申请公布号 |
GB2036087(B) |
申请公布日期 |
1982.10.27 |
申请号 |
GB19790037905 |
申请日期 |
1979.11.01 |
申请人 |
SIEMENS AG |
发明人 |
|
分类号 |
C01B17/765;H01G4/14;(IPC1-7):23C13/08 |
主分类号 |
C01B17/765 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|