| 摘要 |
PURPOSE:To form an extremely good photoconductive layer by mixing >=2 kinds of the silicon compds. expressed by the specific formula at specific ratios, and mixing these with materials consisting of carbon atoms as constituting elements thereby constituting a raw material for formation of photoconductive layers. CONSTITUTION:A raw material for formation of photoconductive layers is constituted of at least 2 kinds of the compds. expressed by the formula SinH2n+2 (n is a positive integer) and a material consisting of carbon atoms as constituting elements. The ratios of the compds. of the formula are such that with respect to the compd. of the lowest owder of (n), for example, Si2H6, the compds. of (n) of higher order than this, for example, Si3H8, Si4H10 are contained at >=1vol%, more preferably >=5vol%. There are, for example, nitrogen, ammonia, hydrazine, etc. as the raw material for introduction of carbon atoms, and these are mixed at about <=8vol% based on the compds. of the formula. Such raw material is introduced in a gaseous state into a deposition chamber under decreased pressure, wherein electric discharge is caused, whereby a good photoconductive layer is formed over a large area on a substrate. |
