发明名称 |
Synthesis of silicon nitride. |
摘要 |
<p>A process for synthesizing silicon nitride by reacting a silicon halide and ammonia at a high temperature, which is characterized by that at least while the reaction product is amorphous, hydrogen and chlorine are burned in a reaction zone where a halogen containing inorganic silicon compound and ammonia, and the reaction of said both reactants is effected by the heat of combustion thus obtained.</p> |
申请公布号 |
EP0063272(A1) |
申请公布日期 |
1982.10.27 |
申请号 |
EP19820102743 |
申请日期 |
1982.03.31 |
申请人 |
ASAHI GLASS COMPANY LTD. |
发明人 |
SATO, KIMIHIKO;TERASE, KUNIHIKO;KIJIMUTA, HITOSHI |
分类号 |
C01B21/068;(IPC1-7):01B21/068 |
主分类号 |
C01B21/068 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|