发明名称 ETCHING METHOD OF SEMICONDUCTOR FOR PREVENTING ELECTRODE DISCOLORATION
摘要 The glass layer(3) is formed after aluminum layer, metal(2) is made on silicon base(1). Then photo resistor is painted on the glass layer. Then part forming electrode is melted by photo masking method. The glass layer is melted by photo masking with solution of CrO3 added to B-HF and CH3COOH. Its ratio is 3(volume) : 1(volume) : 1g/B-HF 300(volume). This solution combines with aluminum layer(2), metal, so that it forms a protective film (Al2O3) (5).
申请公布号 KR820002036(B1) 申请公布日期 1982.10.25
申请号 KR19810001560 申请日期 1981.05.06
申请人 SAMSUNG ELECTRONICS CO LTD 发明人 KIM DO SHICK
分类号 H01L21/306;(IPC1-7):H01L21/30 主分类号 H01L21/306
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