发明名称 MANUFACTURE OF TARGET FOR IMAGE PICKUP TUBE
摘要 PURPOSE:To increase the homogeneous property of the film, and enhance the shading characteristic of a target for an image pickup tube by forming a transparent conductive film and a photoconductive film, in that order, over the inner wall of a face plate, and removing unnecessary parts of the said transparent conductive film and photoconductive film. CONSTITUTION:A transparent conductive film 19 is formed on a face plate 18 with a large diameter, and a photoconductive film 20 having a larger diameter than the film 19 is formed over the film 19 by vapor deposition. Next, after this is subjected to heat treatment process, a high-resistance layer 21 made of a glass such as As2Se3 is formed on the photoconductive film 20 by high-vacuum vapor deposition or something similar, and a base glass 23 is fixed over the layer 21 by use of an adhesive 22. Then, after a thin plate 18a is polished, a stripe-filter face plate 25 is fixed over the thin plate 18a by means of an adhesive 24. After that, the base glass 23 is separated, and unnecessary parts of the thin plate 18a and the photoconductive film 20 are removed. By the means mentioned above, the homogeneous property of the film can be incresed, and the shading characteristic of the target can be enhanced.
申请公布号 JPS57172633(A) 申请公布日期 1982.10.23
申请号 JP19810057554 申请日期 1981.04.16
申请人 TOKYO SHIBAURA DENKI KK 发明人 KUWAHATA TAKAO;MANABE SOUHEI
分类号 H01J9/233;(IPC1-7):01J9/233 主分类号 H01J9/233
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