| 摘要 |
PURPOSE:To achieve trimming without losing the left-right balance of a tuning fork and decreasing a Q factor, by adjusting the frequency by forming a groove in the center of a tuning fork oscillator base in its width direction a the root part of oscillator leg parts. CONSTITUTION:A piezoelectric film 5 is formed over the external surfaces of the oscillation leg parts 2 and 3 of a tuning fork oscillator 1, and the external entire surface of a base part 4 succeeding to the leg parts 2 and 3. At the root part of the leg parts 2 and 3, a V-shaped groove 12 is formed from the center position of the oscillator base in its direction of its width W toward the tuning fork oscillator base 4. For the formation of the groove 12, for example, extremely thin foil 13 is used. Thus, the frequency is lowered. In the figure, 6' is an electrode. |
