FORMATION OF METALLIC SILICIDE LAYER WITH HIGH MELTING POINT,申请号JP19810036383-传众专利搜索

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发明名称	FORMATION OF METALLIC SILICIDE LAYER WITH HIGH MELTING POINT
摘要
申请公布号	JPS57170814(A)	申请公布日期	1982.10.21
申请号	JP19810036383	申请日期	1981.03.13
申请人	FUJITSU KK	发明人	INOUE MINORU;SATOU YASUHISA
分类号	H01L21/70;C01B33/06;C23C10/30;C23C14/06;C23C14/14;C23C14/58;C23C16/42;H01L21/20;H01L21/28;H01L29/423;H01L29/43;H01L29/49	主分类号	H01L21/70
代理机构		代理人
主权项
地址

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