METHOD OF FORMING SMOOTH AND PINHOLE-FREE SILICON CARBIDE FILMS ON A SILICON SUBSTRATE,申请号EP19780430009-传众专利搜索

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发明名称	METHOD OF FORMING SMOOTH AND PINHOLE-FREE SILICON CARBIDE FILMS ON A SILICON SUBSTRATE
摘要
申请公布号	EP0001373(B1)	申请公布日期	1982.10.20
申请号	EP19780430009	申请日期	1978.07.20
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	BALOG, MOSHE;BERKENBLIT, MELVIN;CHAN, SEE-ARK;REISMAN, ARNOLD
分类号	C30B25/02;B41J2/16;C04B41/50;C04B41/87;C23C16/32;C30B29/06;C30B29/36;(IPC1-7):41J3/04;01B31/36	主分类号	C30B25/02
代理机构		代理人
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