| 摘要 |
PURPOSE:To reduce the deterioration and the damage of an X-ray transmission window forming an X-ray exposure apparatus by constructing the window in a composite structure of a beryllium foil and a polyimide film, a parylene film or a polypropylene film with the beryllium foil disposed at a target side. CONSTITUTION:An exciting beam 10 is emitted to a target 2 which is installed in a tubular bulb chamber 1 that is evacuated in vacuum by an exhaust system 7 to generate an X-ray 11, which is passed through an X-ray transmission window and is emitted to a workpiece to be treated and disposed in an exposure chamber 4. In this structure, the window is constructed in a composite structure of a beryllium foil 12 and a polyimide film, a parylene film or a polypropylene film 13 with the foil 12 disposed at the target 2 side. In this manner, since the exposure chamber side of the window is organic compound, the beryllium foil is not contacted with the air when the workpiece is exchanged, and since the withstand voltage becomes high by the organic compound, the damage of the window can be remarkably reduced. |
