| 摘要 |
PURPOSE:To prevent a melt back of the shoulder of a groove formed on a substrate by making the angle forming between the side wall surface of the groove and the substrate growing surface to less than the prescribed angle. CONSTITUTION:An angle theta between the side wall surface of a groove 2 formed on a substrate 1 and the substrate 1 growing surface is set to less than 50 deg.. Thus, solute which is supplied for quick growth of a grown layer at both ends A of the bottom of the groove 2 is performed only in the solution, and melt back of the shoulder B of the groove is not produced. In this manner, A grown layer 3 having no melt back of the shoulder B of the groove can be obtained. This layer 3 has no disorder in the resistivity in the vicinity of the groove 2 and no disorder in the crystallinity as preferable crystal. Further, since the width W of the groove is maintained even after the growth, the effect of the groove 2 thus formed can be performed as it is. |
