| 摘要 |
The local air cleaning apparatus 1 causes a cleaned uniform air flow blown out from an air flow opening face 23 to collide with an air collision face W to flow outside an open region, so as to cause cleanliness to be higher inside a guide 3 and inside the open region than other regions. Additionally, the apparatus 1 includes at least one of a device for measuring pressures inside the guide 3 and inside a push hood 2, a device for measuring the cleanliness inside the guide 3 or of the open region, and a device for measuring a gap area between the guide 3 and the air collision face W, and, to ensure the cleanliness from a result of the measurement, controls such that a flow velocity of the cleaned uniform air flow blown out from the air flow opening face 23 can be decelerated or accelerated. |
