| 摘要 |
PURPOSE:To detect the central position of a wafer thereby to eliminate an edge detecting height sensor and to miniaturize a wafer prober by obtaining wafer edge position information also as a picture pattern recognition processing mechanism in combination having a TV camera, a pattern recognition processor, and a calculation processor used for accurately positioning the wafer. CONSTITUTION:A wafer 1 to be tested is placed on a wafer chuck 2, and accurately positioning TV cameras 5 are arranged at an interval. A circuit which has an X-Y direction moving mechanism 6, a pattern recognition processor 7a, and a calculator 8a is connected to the camera 5, this unit is used to originally position the wafer, but used also as a height sensor. Thus, the camera 5 is movable in X and Y directions, and the chuck 2 is made movable in X, Y, Z and theta directions, and the height of the wafer 1 is detected with the edge of the wafer 1 as a reference with the visual field of the camera 5.
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