PRESSURE TRANSDUCER HAVING ELECTRICALLY SHIELDED PIEZORESISTIVE SENSORS

摘要

- 14 - Case 4251 A PRESSURE TRANSDUCER HAVING ELECTRICALLY SHIELDED PIEZORESISTIVE SENSORS A diffused piezoresistive pressure transducer(10) is provided which is insensitive to surface charges which may develop in the use of the transducer in a fluid-filled pressure transmitter assembly. To accomplish this a metalized shield (20) is formed over the diffused piezoresistive sensors (Rc; Rt) as an integral part of the transducer (10). The metalized shield (20) is connected to an electrical supply source (V.D.C.) to allow any charge build-up on the shield surface (20) to be bled therefrom with i no change in the potential difference between the diffused piezoresistive sensors (Rt; Rc) and the shield (20).