METHOD FOR PROTECTING ION SOURCE APPARATUS

摘要

PURPOSE:To ease the temporary potential difference between components and protect the components by a method wherein a surge absorption element is attached across the components constituting a source plasma generating assembly. CONSTITUTION:A surge absorption element comprising high frequency capacitors 25-30 or non-linear resistors, or a combination of them is connected across each component of a source plasma generating assembly in an ion source apparatus 1 or in the neighborhood of the apparatus. Due to the connections, it is possible to solidify the potential against surge voltage for all components and to allow temporary voltage to be produced across the components, so that these components are protected.