| 摘要 |
PURPOSE:To improve the absorption of a low frequency vibration and shorten the returning time of the level of a machine by a method wherein the level fluctuation of the machine is detected by a non-contacting type sensor and a flow amount adjusting valve, controlling the flow amount of air to the air spring, is controlled by this signal. CONSTITUTION:The air spring 15, to support a surface plate 16 preventing the vibration, is connected with a pipe line 17 through which the air is sent into an air chamber while this pipeline 17 is provided with the flow amount adjusting valve 18, a pressure reducing valve 19 and an air supplying source 20 sequentially. Another pipe-line 21 is ramified from the pipeline 17 between the air spring 15 and the flow amount adjusting valve 18 while an orifice 22 discharging the air at all times is connected to the outer end thereof. The non-contacting level sensor 23 is provided at a position with a preper distance with respect to the surface plate 16 while the signal outputted from this sensor 23 is transmitted to the flow amount adjusting valve 18 throgh a control circuit 24. |
