| 摘要 |
PURPOSE:To provide an ink drop jetting device which eliminates the necessity for troublesome lead wiring work to a piezoelectric vibrator element by integrally combining an electrode pattern made of metal membrance which is formed on a substrate provided with a pressure chamber with a piezoelectric vibrator element with a thin layer of adhesive placed between them. CONSTITUTION:On the back of a substrate 21 wherein one or plural pressure chambers 23 and jet passages are formed by photoengraving method, a film of silicon dioxide 34 is formed and a pair of substrate electrodes 35, 36 composed of laminated metal layers of Cr-Cu-Au, etc. are formed on the SiO2 film 34 at such positions corresponding to the pressure chambers 23. On the one hand, on a piezoelectric vibrator element 25, an upper surface electrode 25a which begins the upper surface, covers one side edge and extends to part of the underside is formed and an underside electrode 25b is also formed with a sufficient distance (a) for securing insulation from the electrode 25a provided between them. The piezoelectric vibrator element 25 thus composed is positioned so that the electrodes 25a, 25b are placed to correspond to parts to be adhered 35a, 36b, an adhesive 26 is applied and they are heated and hardened with a proper adhesion load applied. Since the adhesion layer to be obtained is less than 10mum in thickness, it doesn't hamper the conduction of electricity between both electrodes. |
