| 摘要 |
PURPOSE:To obtain a recording medium superior in durability, by exposing a base material to the plasma of N2 or O2 to nitride or oxidize the surface after a ferromagnetic metallic thin film layer and/or a metallic thin film layer consisting of Al or the like are formed on the base material. CONSTITUTION:A ferromagnetic metallic thin film layer and/or a metallic thin film layer consisting of one or more among Al, Ti, Cr, and Si are formed on a base material. This ferromagnetic metallic thin film layer or the metallic thin film layer on this thin film layer is exposed to the plasma of gaseous N2 or O2 to nitride or oxidize the surface of the ferromagnetic metallic thin film layer or the metallic thin film layer. For example, a base material 4 where the ferromagnetic metallic thin film layer or the like is formed is set to a substrate 3 in a vacuum tank 1 and is exposed to the plasma of gas generated by a high frequency electrode 6 to nitride or oxidize the surface. |
