| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device and a transfer method capable of positioning a plate-like member during conveyance, by preventing breakdown of the plate-like member.SOLUTION: A transfer device 10 includes conveyance means 20 for taking out a plate-like member WF, while supporting, from housing means CT housing the plate-like member WF, and detection means 30 provided in the conveyance means 20, and capable of detecting the position of the plate-like member WF. The detection means 30 is provided to be able to detect the position of the plate-like member WF in the surface direction, by moving relatively to the plate-like member WF supported by the conveyance means 20.SELECTED DRAWING: Figure 1 |
