摘要 |
PURPOSE:To perform accurate evaluation in a short time by applying an AC full-wave voltage to a semiconductor device to be tested, and recording variations in forward and backward leakage currents at the same time. CONSTITUTION:A leakage current recording circuit is an absolute-value amplifying circuit wherein a differential amplifying circuit and an inverting amplifying circuit are coupled with each other; output voltages of amplifiers A1 and A2 which amplify the absolute value of a voltage higher than a reference voltage E, and those of amplifiers A1' and A2' which amplify the absolute value of a voltage lower that it are divided respectively, and a DC voltage recorder DV measure a leakage current. Thus, an AC full-wave voltage is applied to a thyristor to be tested and variations in positive and negative leakage currents are recorded and detected. Consequently, tested products are evaluated precisely and a test time is shortened. |