发明名称 Polishing Composition
摘要 A polishing composition of the present invention is to be used for polishing an object including a metal portion or an interlayer insulation film. The polishing composition contains silica on which an organic acid, such as a sulfonic acid and a carboxylic acid, is immobilized and an oxidizing agent.
申请公布号 SG10201604608Q(A) 申请公布日期 2016.07.28
申请号 SG10201604608Q 申请日期 2012.12.25
申请人 FUJIMI INCORPORATED 发明人 YOKOTA, SHUUGO;KACHI, YOSHIHIRO;AKATSUKA, TOMOHIKO
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