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发明名称
PREPARING APPARATUS OF RIBBON-LIKE CRYSTAL
摘要
申请公布号
JPS57166395(A)
申请公布日期
1982.10.13
申请号
JP19810052306
申请日期
1981.04.07
申请人
TOSHIBA KIKAI KK
发明人
NOZAWA MASAYUKI
分类号
C30B15/34;H01L21/02;H01L21/208
主分类号
C30B15/34
代理机构
代理人
主权项
地址
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