SEMICONDUCTOR DEVICE

摘要

Provided is a semiconductor device including an interconnection structure provided on a cell region of a substrate to include a first line and a second line sequentially stacked on the substrate, and a defect detection structure provided on a peripheral region of the substrate to include first and second defect detection lines provided at the same levels as those of the first and second lines, respectively.

主权项

1. A semiconductor device, comprising:
a substrate including a cell region and a peripheral region; an interconnection structure on the cell region to include a first line and a second line sequentially stacked on the substrate; and a defect detection structure on the peripheral region to include a first defect detection line and a second defect detection line provided at the same levels as those of the first and second lines, respectively.