| 发明名称 |
VERTICAL WAFER BOAT |
| 摘要 |
Provided is a vertical wafer boat with columns having a rectangular cross section, and capable of making a flow of a film-forming gas between wafer support portions more uniform, suppressing variation in the film thickness in a wafer plane, and forming a more uniform film. A vertical wafer boat includes columns on which wafer support portions for mounting a plurality of wafers are formed, and a top plate and a bottom plate that fix upper and lower end portions of the columns. At least one of the columns includes two column portions and extending in an up and down direction and having a rectangular cross section, and a plurality of the wafer support portions that connects the two column portions and mounts wafers on upper surfaces. |
| 申请公布号 |
US2016233117(A1) |
申请公布日期 |
2016.08.11 |
| 申请号 |
US201615040680 |
申请日期 |
2016.02.10 |
| 申请人 |
CoorsTek KK |
发明人 |
KUROI Shigeaki;KIMURA Tomokazu;LI Jianhui |
| 分类号 |
H01L21/673 |
主分类号 |
H01L21/673 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A vertical wafer boat comprising:
columns in which wafer support portions for mounting a plurality of wafers are formed; and a top plate and a bottom plate that fix upper and lower end portions of the columns, at least one of the columns including two column portions extending in an up and down direction, and having a rectangular cross section, and a plurality of the wafer support portions that connect the two column portions and mount the wafers on upper surfaces. |
| 地址 |
Tokyo JP |
