| 摘要 |
PURPOSE:To improve the quality, by providing exciting electrodes and a resistance heating element as a mutilayered conductive film on the surface of a piezoelectric oscillating bar. CONSTITUTION:Exciting electrodes 2 ane 2' are formed as the first conductive film on the surface of a quartz oscillating bar 1 by the photolithography or the like. A thin film 5 consisting of insulating materials such as SiO is provided on the surface except conductive parts 3 and 4 of exciting electrodes 2 and 2' by the vapor-deposition, the sputtering, the ion plating, or the like. After that, a resistance heating element 6 is formed as the second conductive film by the photolithography or the like. After connecting conductive parts 3 and 4 of exciting electrodes 2 and 2' to lead wires 8 and 9 of a stem 1 and connecting conductive parts 12 and 13 of the resistance heating element 6 to lead wires 10 and 11, a cylindrical case 14 is sealed tightly, thus completing a cylindrical quartz oscillator. |
