发明名称 MANUFACTURE OF PICKUP-TUBE TARGET
摘要 PURPOSE:To obtain a smooth transparent electrode which doesn't cause any adverse effect on an image pickup picture by taking advantage of a gaseous phase reaction between steam and anhydrous tin tetraoxide. CONSTITUTION:A base plate 4 is placed on a hot plate 2, and the temperature of the plate 2 is regulated to be constant. Then, steam is fed through a gas introducing path 10 into a reaction case 1 at a constant rate so as to fill the case 1 with the gas. When the flow of the gas becomes constant, a carrier gas containing anhydrous tin tetrachloride is introduced into the case 1 through the gas introducing path 10 so as to form a transparent tin-oxide electrode over the base plate 4 through reaction.
申请公布号 JPS57163944(A) 申请公布日期 1982.10.08
申请号 JP19820039540 申请日期 1982.03.15
申请人 HITACHI SEISAKUSHO KK 发明人 INAO KIYOHISA;ADAKA SABUROU;HIRAI TADAAKI;MARUYAMA EIICHI;TANAKA YASUO;OOKI KEIKO
分类号 H01J9/233;H01J29/45 主分类号 H01J9/233
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