| 摘要 |
PURPOSE:To measure the fine displacement of a body surface rapidly and accurately by a measuring device which uses optical fibers, while removing a chip on the surface, by flowing a light-transmissive fluid filling a space between fiber end surfaces and the surface to be measured. CONSTITUTION:An optical fiber cable 3 consisting of fibers for projection and photodetection is arranged opposite the surface of a body 2 to be measured which is ground with a grindstone 1, and a fiber 6 for correction is also provided. So that the distance between the optical fiber cable 3 and the surface of the body 2 is held proper, a housing 5 is driven through a displacement detector 14, a transducer 15, an amplifier 16, and a servo-motor 4. Light from a light source 17 is reflected by the body surface to detect surface roughness by a transducer 18, a filter 20, and a divider 21. To fill a space between the body surface and the end surface of the fiber cable 3 with a light-transmissive grinding fluid, the grinding fluid is circulatd by a pump 10 through a flow passage consisting of a grinding-fluid flusher 11, a duct 9, an intake 7, an outlet 8, and a tank 13. |
