| 摘要 |
A confocal measurement device (100, 100a, 100b, 101, 102) uses confocal optics to measure a profile at multiple points on a measurement object (200, 200a, 200b). The confocal measurement device (100, 100a, 100b, 101, 102) is provided with a light source (21), an optical head (10), a spectrometer (23), and an imaging element (24). The confocal measurement device (100, 100a, 100b, 101, 102) uses a plurality ofthe optical heads (10) to generate an axial chromatic aberration in light, irradiate the measurement object (200, 200a, 200b) with the light, and allow the light in focus on the measurement object (200, 200a, 200b) to pass therethrough. Further, a branching optical fiber and an optical fiber (11) introduce the light that passed through the plurality of optical heads (10) into a single spectrometer (23). Moreover, the light dispersed in the confocal measurement device (100, 100a, 100b, 101, 102) is received at the imaging element (24) arranged one-dimensionally along the dispersion direction of the spectrometer. A control circuit (25) obtains a peak wavelength from the light received at the imaging element (24) corresponding the plurality of optical heads (10). |
