发明名称 METHOD OF SELECTIVELY DEPOSITING METAL ON A CERAMIC SUBSTRATE WITH A METALLURGY PATTERN
摘要 <p>METHOD OF SELECTIVELY DEPOSITING METAL ON A CERAMIC SUBSTRATE WITH A METALLURGY PATTERN A liftoff process for selectively depositing additional metal layers on an existing metallurgy pattern supported on a dielectric substrate which includes the steps of (1) depositing a hardenable material on the dielectric substrate which has the characteristic of wetting the substrate surface, but not the existing metallurgy pattern, (2) heating the hardenable material to convert it to a liquid wherein the material is distributed to cover the dielectric substrate surface, but not the metallurgy pattern,(3) cooling the hardenable material to solidify it,(4) depositing a blanket layer of metal on the surface of the substrate, (5), dissolving the hardenable material in a suitable solvent thereby removing the material and the overlying metal layer portions.</p>
申请公布号 CA1132857(A) 申请公布日期 1982.10.05
申请号 CA19790341840 申请日期 1979.12.13
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人
分类号 B32B3/08;C04B41/51;C04B41/88;C23C14/04;G03F7/00;H01L21/48;H05K3/22;H05K3/24;H05K1/03;H05K1/09 主分类号 B32B3/08
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