发明名称 Substrate separating machine and method
摘要 A machine and method for subdividing into individual substrates a wafer which is prescored with a pattern of intersecting score lines defining the substrates. The wafer is progressively directed over a first wafer-engaging surface substantially paralleling one set of score lines, and this surface operates during a breaking operation to impart a localized force at a score line in the set. The wafer is halted for the breaking operation, after which the broken-off portion is directed over a second wafer-engaging surface substantially paralleling the other set of score lines. This second surface operates, during a substrate breaking operation, to apply a localized force adjacent a score line of the other set. The broken-off portion is also halted for this second breaking operation, in which an individual substrate is separated from the previously broken-off portion of the wafer. An inclined track transports the material from the first to the second breaking operation. A magazine may be provided at the end of the track into which the separated substrates are inserted in a uniformly oriented manner; preferably through a hole in the bottom of the track.
申请公布号 US4352446(A) 申请公布日期 1982.10.05
申请号 US19800163171 申请日期 1980.06.26
申请人 MTI SYSTEMS CORPORATION 发明人 YOUNG, DAVID H.
分类号 B26F3/00;B28D5/00;H01L21/304;(IPC1-7):B26F3/00 主分类号 B26F3/00
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