| 摘要 |
PURPOSE:To hold pressure setting value at on and off parts not to be varied, by a method wherein one diaphragm of a laminated diaphragm is held airtight and each of other diaphragms has one or plural holes perforated thereon. CONSTITUTION:A laminated metal diaphragm 3 is interposed between a first cabinet 1 and a second cabinet 2, periphery of the laminated diaphragm is fixed to the cabinet, and opposite cavities A, B are separated by the laminated diaphragm 3. One diaphragm 31 of the laminated diaphragm 3 is held airtight and each of other diaphragms has one or plural holes 5. In this constitution, even if snap action is carried out more than prescribed times, pressure setting value at one and off parts can be held not to be varied. |
