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发明名称
摘要
申请公布号
JPS57157135(U)
申请公布日期
1982.10.02
申请号
JP19810042443U
申请日期
1981.03.26
申请人
发明人
分类号
H01J37/30;H01L21/027;H01L21/30;(IPC1-7):H01L21/30
主分类号
H01J37/30
代理机构
代理人
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