| 摘要 |
PURPOSE:To improve quality and efficiency of laser working by setting a working nozzle and a condenser to proper position automatically in laser working. CONSTITUTION:The distance between a working nozzle 8 and the surface of a work is measured by a nozzle position detector 10, and shifting of the working nozzle to a position suitable for the purpose is instructed by an arithmetic circuit 11. The position of the working nozzle 8 is set automatically by a nozzle position driving mechanism 12. Then, a laser beam is irradiated on the surface of the work 6 to generate plasma that has brightness proportionate to the output density. The brightness of plasma is measured by a photo-sensor 16 and a brightness measuring device 15 while moving the lens along Z-axis by a lens driving mechanism 13. Signals from the brightness measuring device 15 and a position reading device 14 are inputted to a control device 17. The position of the lens on the Z-axis at which brightness becomes maximum is operated and inputted to the driving mechanism 13, and the position of the lens is set automatically to bring the work at focus. |
