METHOD OF COATING SEMICONDUCTOR WAFER WITH PHOTORESIST,申请号JP19820018316-传众专利搜索

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发明名称	METHOD OF COATING SEMICONDUCTOR WAFER WITH PHOTORESIST
摘要
申请公布号	JPS57159024(A)	申请公布日期	1982.10.01
申请号	JP19820018316	申请日期	1982.02.09
申请人	WESTERN ELECTRIC CO INC	发明人	JIYON DEIBUITSUDO KASUBAATO;NIKORASU ARETSUKU SOOSU
分类号	H01L21/027;H01L21/30	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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