INSPECTING DEVICE OF PATTERN

摘要

PURPOSE:To enable the inspection of a pattern in high reliability by detecting the displacement of the detecting pattern due to a CCD with respect to the pattern produced by a bit pattern generator (BPG) and providing a correction mechanism for correcting the displacement. CONSTITUTION:A basic pattern 6 formed by a BPG and a pattern1 to be detected by a CCD are detected by a detecting picture element 7. When the position becoming the same pattern edge is, for example, disposed at the basic pattern 6 of the BPG to detect NA and at the pattern 6 to detect NB, a correction mechanism 8 which moves the CCD to correct the difference DELTAS between the NA and the NB and to set the difference DELTAS to zero is provided. That is, a rockable box 10 is moved from the support 14 via a roller 21 and an adjustment screw 15. The position of X-Y directions of the CCD can be corrected by providing the two mechanism 22.