| 摘要 |
PURPOSE:To make setting of flow rate easy and to make erroneous setting difficult and to vary the flow rate range easily and surely, by reading out the flow rate range from a storage means of the flow rate range and displaying always. CONSTITUTION:An input/output controlling circuit 20 outputs the value of flow rate which is set up by digital switches 7, 8, 9 and the voltage corrected by a correcting constant read out from a memory 25 corresponding to gas designated by a switch 11, into a mass flow meter 22. The gas is controlled by the meter 22 so as to be the flow rate designated by the circuit 20. Further, a flow rate range is read out from the address of the memory 25 corresponding to the gas designated by the switch 11 and is displayed at 21. In the case of setting the flow rate at the real flow rate by the switches 7, 8, 9, the setting process is very easy because the flow rate range corresponding to said gas is displayed at 21 immediately by varying the gas designation by the switch 11. |
