摘要 |
PURPOSE:To display a damage distribution on a metallic surface, on a video device, by analyzing kinetic energy of an exoelectron emitted in accordance with a degree of activity and a degree of new generation of a metallic sample. CONSTITUTION:When an ultraviolet luminous flux having a suitable expanse is irradiated to a sample 1, an exoelectron having various kinetic energy is emitted, and an exoelectron intensity signal I is obtained in an output terminal of a counting rate meter 11. The signal I is inputted to a storage operating device 14 together with a place signal in the X and Y directions, obtained from a sample driving device 13. This storage operating device 14 outputs a difference DELTAI of two exoelectron intensity signals obtained when the grid potential of an energy filter 8 has been varied, and this output is inputted to a video device 15 together with the place signal in the X and Y directions. In this way, a damaged part of a sample can be displayed on the video device from the viewpoint of information of a degree of activity and a degree of new generation by detecting the kinetic energy of the exoelectron. |