发明名称 MEASURING DEVICE OF DAMAGE DISTRIBUTION ON METALLIC SURFACE
摘要 PURPOSE:To display a damage distribution on a metallic surface, on a video device, by analyzing kinetic energy of an exoelectron emitted in accordance with a degree of activity and a degree of new generation of a metallic sample. CONSTITUTION:When an ultraviolet luminous flux having a suitable expanse is irradiated to a sample 1, an exoelectron having various kinetic energy is emitted, and an exoelectron intensity signal I is obtained in an output terminal of a counting rate meter 11. The signal I is inputted to a storage operating device 14 together with a place signal in the X and Y directions, obtained from a sample driving device 13. This storage operating device 14 outputs a difference DELTAI of two exoelectron intensity signals obtained when the grid potential of an energy filter 8 has been varied, and this output is inputted to a video device 15 together with the place signal in the X and Y directions. In this way, a damaged part of a sample can be displayed on the video device from the viewpoint of information of a degree of activity and a degree of new generation by detecting the kinetic energy of the exoelectron.
申请公布号 JPS57158546(A) 申请公布日期 1982.09.30
申请号 JP19810044537 申请日期 1981.03.25
申请人 KOGYO GIJUTSUIN (JAPAN) 发明人 YAMAMOTO SHIGEYUKI
分类号 G01N23/22;G01N23/227;G01N33/20 主分类号 G01N23/22
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