| 摘要 |
PURPOSE:To improve the connection precision and facilitate the production, by utilizing anisotropic etching of a silicon single crystal to form an optical fiber, a lens, a connector pin receiving groove on one silicon substrate. CONSTITUTION:A lens fixing groove 2 of refractive index distribution type, a fixing groove 3 for an optical fiber bare wire 6, and a fixing groove 4 for an optical fiber coating wire 7 are formed cooxially on the surface of a substrate 1 where anisotropic etching of silicon single crystal is utilized, and these grooves 2, 3, and 4 are constituted in parallel as one unit, and receiving grooves 8, 8 for connector pins 11 are provided in both end parts of the substrate 1. In any of the grooves, the side wall consists of (111) plane of crystal and the bottom face consists of (100) plane of crystal, and a pair of these substrates are connected while matching optical axes to each other in end faces. When a lens having an odd-fold length of the 1/4 pitch is used as a lens 5, the light is transmitted surely even if a gap is generated in the connection part of lenses. |
