| 摘要 |
PURPOSE:To give degrees of freedom that make a titled auxiliary jig adaptable itself to shapes of wafers to said jig by constituting the same of a thin sheet having >=2 pieces of sample fixing pawls on the front, and a dovetail groove or spring for fixing to the notched part of a planetary type jig on the rear. CONSTITUTION:This auxiliary jig 21 for a planetary type jig for objects to be vapor deposited is a thin sheet of a circular shape made of Al, quartz, etc., and has a notched part 24 for moving of a coil-like spring 12 of a planetary type jig 11 of a spherical shape for objects to be vapor deposited and wafer holding pawls 23. A dovetail groove 22 or a spring is formed to the part 24, and when it is inserted into the notched part 13 of the jig 11 from the outer side, it is easily fixed to the jig 11 and is stopped by pawls 14. The wafer to be held is surely fixed by means of the pawls 23 and the spring 12. This jig 21 is secured to the jig 11 with one piece of pincette and is easy to clean and dry. |
