发明名称 LIQUID-PHASE EPITAXIAL GROWTH METHOD
摘要 PURPOSE:To remove residue, and to obtain a smooth epitaxial grown surface by laminating last Pb1-xSnxTe, keeping a slide and a supporting base at a crystalline temperature or lower and contacting the slide and the supporting base with the Pb or PbTe of a liquid phase in another reservoir. CONSTITUTION:A substrate 12 made of PbTe and a dummy plate 13 are contained in the supporting base K made of carbon, Pb1-xSnxTe is each received in the reservoirs 15-17 of the slide while making Sn concentration differ, a reservoir 18 is emptied, and Pb 23 is received in the reservoir 19. A device is inserted into a quartz pipe in a H2 atmosphere, and heated at 600 deg.C, and the materials of each reservoir are melted. Three layers having different x values are formed in epitaxial shape in the same manner as conventional devices, and the melted residue of the surface is shaven off by the corner of the bottom B of the empty reservoir 18. An oven is rapidly cooled to 500 deg.C, the liquid phase Pb 23 in the reservoir 19 is contacted with the substrate 12, and a member 14 is left slid. Since the temperature of the liquid phase Pb is 500 deg.C and its viscosity is high at that time, the melted residue of Pb1-xSnxTe on the substrate is wrapped by Pb and easily wiped out, Pb does not adhere on the surface, and the flat surface is shaped.
申请公布号 JPS57157531(A) 申请公布日期 1982.09.29
申请号 JP19810043653 申请日期 1981.03.24
申请人 FUJITSU KK 发明人 KAWABATA YOSHIO;SHINOHARA KOUJI;NISHIJIMA YOSHINDO;FUKUDA HIROKAZU;YAMAMOTO KOOSAKU
分类号 H01L21/368;H01S5/00 主分类号 H01L21/368
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