| 摘要 |
PURPOSE:To easily measure electrical values of photosensing element and improve productivity thereof by providing at least a pair of photosensing elements for test connected to a common electrode at the one end thereof and a leadout wiring connected to the other end of such photosensing element for test. CONSTITUTION:A photoconductive film 13 is formed through a transmissive bonding layer 12 on the entire part of transmissive substrate 11 made of quartz. A common electrode 15 and a individual electrode 16 are provided on the ohmic connecting layers 14a, 14b formed opposed to each other across a determined interval and a plurality of photosensing elements 17... are provided within such interval. In the case of the common electrode 15 in each group, an external connecting wiring 15a protrudes and in the case of the individual electrode 16, a line wiring 16a protrudes. In the common electrode 15 of each group, at least a pair of photosensing elements 18 for test are provided toward the peripheral part in the side of common electrode 15 of substrate 11. In order to detect the etching end timing, a probe pin for measurement is provided in contact with the common electrode 15 and leadout wiring 19 and measurement of photosensing element 18 for test is carried out, thereby such measuring value can be assumed to be the measured value of the photosensing element 17. |
