Load-compensated type guide mechanism adapted for a machine

摘要

A load-compensated type guide mechanism, adapted for a machine incorporating a movable machine part and a stationary base having a guide surface on which the movable machine part slides, is provided with a pressurized fluid supply source from which a pressurized fluid is supplied between the slide surface of the movable machine part and the guide surface of the base. The static pressure of the pressurized fluid is adjusted by pressure control means so that the static pressure for supporting the movable machine part is smaller than the entire perpendicular load of the machine part acting on the guide surface. The static pressure of the pressurized fluid is changed in response to a change in a perpendicular displacement of the machine part with respect to the guide surface. The change in the perpendicular displacement is detected by detecting means.