| 摘要 |
PURPOSE:To prevent the top layers from collapsing down despite formation of cracks on target surface and enable even sputtering to be continuously performed by so disposing the targets that their surfaces face diagonally upward. CONSTITUTION:Targets 13, 13' and substrates 14, 14' are provided diagonally parallel and the targets 13, 13' are so disposed that their surfaces face diagonally upward. For example, when the targets 13, 13' are provided with an inclination of 60 deg., cracks stay in their positions and have no worry of collapsing down even when they are formed. Hence, the targets 13, 13' may be used out to the last and uniform sputter films may be deposited on the substrates 14, 14'. |
