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发明名称
WET ETCHING METHOD
摘要
申请公布号
JPS57155381(A)
申请公布日期
1982.09.25
申请号
JP19810041440
申请日期
1981.03.19
申请人
MITSUBISHI DENKI KK
发明人
OOHAYASHI YOSHIKAZU;KOTANI HIDEO;SATOU SHINICHI;MIZUGUCHI KAZUO;DENDA MASAHIKO
分类号
C23F1/00;H01L21/306
主分类号
C23F1/00
代理机构
代理人
主权项
地址
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