| 摘要 |
PURPOSE:To form magnetic thin film having desired properties readily, by reacting the enough amount of gas molecules supplied at supersonic velocity with atoms to be evaporated locally in high vacuum. CONSTITUTION:The unidirectional, high speed and high density gas molecular stream is obtained by making the supersonic molecular stream by ejecting the gas for the reaction from a nozzle 1 via a valve 4 to a high vacuum container under the back pressure from ca. 0.05 atm to several atm, excluding the impulse wave generating in the supersonic flow by a skimmer 2, further controlling the direction by a collimator 3. The gas molecules which does not pass the skimmer 2 or the collimator 3 are discharged from the discharging pipes 5, 6. The flow of atom to be evaporated generating from an evaporation source 7 reacts with said gas molecular beam at the local position restricted by a masking plate 8 and forms the evaporated film on the substrate film 12 on a roll 11. |
