| 摘要 |
PURPOSE:To increase a magnetic permeability in a high frequency region and improve a character as a magnetic head by a method wherein one-axis magnetic anisotropy having Ku value less than a specified value is provided in the interior of the thin film in an amorphous alloy thin film magnetic core of 3d transistion metal and semimetal system. CONSTITUTION:Amorphous alloy thin film is formed by using the alloy of 3d transition metal and semimetal system, for example, the alloy of Co-Fe-B system for target material and a heat treatment of 300 deg.C, 2hr is provided in a rotary magnetic field or is held 300 deg.C, 2hr while applying AC magnetic field along the thickness direction of the thin film, thereafter it is cooled quickly upto the room temperature while applying the AC magnetic field. According to such the heat treatment, one-axis magnetic anisotropy having a value within the range of Ku= 5X10<2>erg/cc is provided for the interior of the thin film face. A recording property for the magnetic head or the like can be improved, which has a very high magnetic permeability in the high frequency region and a manufacturing process also be simplified more. |
