| 摘要 |
PURPOSE:To make it possible to carry out effective heat treatment of susbtrates of comparatively larger areas by providing a burning container assembly which consists of a shallow container body of box shape made of high density graphite and a lid of the same substance which can fit loosely on the container body. CONSTITUTION:The burning container assembly comprises the shallow container body 1 in box shape made of high density graphite whose porosity is 12%, containing not more than 70ppm of Fe, Cu and Ag and the lid 2 with a small hole 3 made of the same substance which can be fitted loosely on the container body. A substrate 4 to be burnt is set in the container body to form a sintered film of a compound semiconductor such as CdS, etc. by heat treatment. This feature makes it possible to carry out heat treatment of compound semiconductors of comparatively larger areas so that good photosensors can be manufactured. |
