发明名称 WIRE BONDER
摘要 PURPOSE:To prevent the occurrence of deformation and distortion of a wire by eliminating an impact to the wire and to perform suitable wire bonding by a method wherein an elastic material is arranged at least one interior side of a clamper. CONSTITUTION:Clamping sections 19, 20 are formed with a conductive metal material. Silicon rubber 22 is pasted to the inside surface of the clamping section 20 as an elastic material and a metal wire is held between the inside surface of the clamping section 20 and the metal surface of the other clamping section 19. Wire bonding is performed by the cooperative action of a clamper 13 and a bonding arm 10. And the existence or absence of the metal wire can be detected as the metal surface of the clamp section 19 is contacted with the metal wire 16 for conductivity. And when the metal wire 16 is cut from the second bonding section, an excessive impact is not provided to the wire by impact absorption action by the elastic material 22 even if the metal wire 16 is clamped by operating the clamper 13 at high speed and by closing the clamp sections 19, 20 at high speed.
申请公布号 JPS57155736(A) 申请公布日期 1982.09.25
申请号 JP19810040296 申请日期 1981.03.23
申请人 HITACHI SEISAKUSHO KK 发明人 SHIMATA TSUTOMU
分类号 H01L21/60 主分类号 H01L21/60
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